CPD Clamp-On Ultrasonic Flow Sensors / Flow Meters in CDS Chemical Supply Devices

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Application Background
The CDS Chemical Supply Cabinet (Chemical Delivery System) is used for centralized supply and distribution of high-purity chemicals, playing an important role in multiple stages of automated processes. Transported liquids include photoresists, slurries, strong acids (such as H₂SO₄, HF), strong alkalis (such as KOH, NH₄OH), and organic solvents (such as IPA, PGMEA).

These chemicals are precisely transported through pipelines to wet process equipment. CDS equipment typically adopts "one active, one standby" supply cabinets, pumps, filters, and flow sensors/flow meters, achieving automated proportioning, constant pressure/constant flow delivery, and zero contamination risk.

XY-TEK CPD clamp-on ultrasonic flow sensor / flow meter, as a non-invasive flow rate measurement tool, can be seamlessly integrated into the circulation tubing of CDS cabinets, providing real-time flow measurement and supporting full-process digital closed-loop control. The CPD ultrasonic flow sensor / flow meter uses corrosion-resistant housing materials, has a compact size, and is suitable for installation in space-constrained chemical delivery equipment environments.
CDS Flow Rate Measurement Challenges
CDS chemical supply cabinets face multiple challenges in high-precision processes, affecting production efficiency, safety, and cost control.
1. Corrosive media such as HF, H₂SO₄, KOH cause traditional metal flow meters to corrode and leak within months; sensor corrosion products contaminate the chemicals.
2. Viscous chemical liquids like adhesives have viscosities as high as thousands of centipoise; liquid solidification clogs flow meter pipelines, leading to inaccurate measurements.
3. Metal ions from flow meters contaminate ultra-pure chemicals.
4. Disassembly operations during installation and maintenance of in-line flow meters increase pipeline contamination risk.
5. Dense internal piping in supply cabinets leaves extremely limited installation space for flow meters.
6. Flow meters requiring long straight pipe sections are difficult to accommodate in complex pipeline layouts.
7. Advanced processes require flow control accuracy of ±2%, which some flow meters struggle to achieve.
8. Unstable measurement in low flow ranges (<1 L/min) affects chemical proportioning accuracy.
CPD Clamp-On Ultrasonic Flow Sensor / Flow Meter Features
• Non-contact measurement, completely solving corrosion and contamination issues
• CPD clamp-on flow sensors/flow meters are installed externally on the tubing, completely isolated from corrosive chemicals, with no moving parts and no contamination risk.
• Capable of measuring various viscous liquids
• Can be clamped externally on various rigid pipe materials such as PFA, PTFE, and PP.
• Lightweight and compact, flexible installation, adapting to the internal space constraints of the equipment
• Clamp-on design requires no tubing cutting; installation can be completed in minutes.
• Low straight tubing requirement (5D upstream, 3D downstream), adapting to complex pipeline layouts.
• 2% flow rate measurement accuracy, repeatability up to ±0.1%, and millisecond-level response speed.
• Built-in bubble detection supports bidirectional flow rate measurement.
CDS Chemical Supply Cabinet Flow Measurement Scenarios

1. Adhesive Supply System

Adhesives have high viscosity; traditional flow meters have large measurement errors, leading to over-addition or insufficient supply.

Solution:

Install CPD flow meters on main supply pipelines to monitor total supply flow in real-time.

Install CPD flow meters on branch pipelines to precisely control the flow distributed to each dispensing branch.

2. CMP Slurry Distribution System

CMP slurries contain solid particles that easily wear traditional flow meters; uneven flow during multi-channel distribution.

Solution:

Install CPD clamp on flow sensors / flow meters simultaneously on main distribution pipes and branch lines to avoid sensor wear from slurry particles.

PLC dynamically adjusts valve openings based on feedback from each branch flow, achieving precise proportioning.

3. Cleaning Solution Delivery System
High-purity liquids are easily contaminated by mechanical flow meters.
Solution:

Non-contact liquid rate measurement, 0 contamination risk.

Mean Time Between Failures (MTBF) > 50,000 hours, long lifespan, minimal maintenance.

Customer Value
• Technical Differentiation: Solves flow measurement challenges for high-viscosity, strongly corrosive media.
• Enhanced Reliability: Non-invasive flow rate measurement design completely eliminates chemical leakage risks, improving equipment safety rating.
• Improved Control Accuracy: Real-time high-precision flow data supports rapid closed-loop control.
• Supports Intelligent Upgrades: Provides flow data foundation for predictive maintenance and process optimization.
• Easy Installation: No pipe cutting required, supports online installation without affecting production line operation.
• Simple Maintenance: Maintenance-free design, no frequent cleaning or calibration needed.
• Quick Installation: Clamp-on design allows flow sensor installation in just minutes.
• Complete Data Traceability: Records detailed data for each supply, supporting quality traceability.
• Anomaly Alarms: Automatic alerts for abnormal flow fluctuations.