CPD Clamp-On Ultrasonic Flow Sensors / Flow Meters in CDS Chemical Supply Devices

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Application Background
The CDS Chemical Supply Cabinet (Chemical Delivery System) is used for centralized supply and distribution of high-purity chemicals, playing an important role in multiple stages of automated processes. Transported liquids include photoresists, slurries, strong acids (such as H₂SO₄, HF), strong alkalis (such as KOH, NH₄OH), and organic solvents (such as IPA, PGMEA).

These chemicals are precisely transported through pipelines to wet process equipment. CDS equipment typically adopts "one active, one standby" supply cabinets, pumps, filters, and flow sensors/flow meters, achieving automated proportioning, constant pressure/constant flow delivery, and zero contamination risk.

XY-TEK CPD clamp-on ultrasonic flow sensor / flow meter, as a non-invasive flow rate measurement tool, can be seamlessly integrated into the circulation tubing of CDS cabinets, providing real-time flow measurement and supporting full-process digital closed-loop control. The CPD ultrasonic flow sensor / flow meter uses corrosion-resistant housing materials, has a compact size, and is suitable for installation in space-constrained chemical delivery equipment environments.
CDS Flow Rate Measurement Challenges
CDS chemical supply cabinets face multiple challenges in high-precision processes, which affecting production efficiency, safety, and cost control.
1. Corrosive media such as HF, H₂SO₄, KOH cause traditional metal flow meters to corrode and leak within months, which will result in contaminate the chemicals, and cause
2. Viscous chemical liquids like adhesives have viscosities >1000 cP, which may clog the flow meter tubing, leading to inaccurate flow rate measurements results.
3. Metal ions from flow meters may contaminate the ultra-pure chemicals.
4. Disassembly operations during installation and maintenance of in-line flow meters increase tubing contamination risk.
5. Dense internal tubing layout in supply cabinets leaves very limited installation space for flow sensors.
6. Flow meters requiring long straight pipe sections is difficult to accommodate in complex pipeline layouts.
7. Advanced processes require flow control accuracy of ±2%, which some flow meters struggle to achieve.
8. Unstable measurement in low flow ranges (<1 L/min) affects chemical proportioning accuracy.
CPD Clamp-On Ultrasonic Flow Sensor / Flow Meter Features
• Non-invasive flow rate measurement, completely solving corrosion and contamination issues
• CPD clamp-on flow sensors/flow meters are installed externally on the tubing, completely isolated from corrosive chemicals, with no moving parts and no contamination risk.
• Capable of measuring various viscous liquids
• Can be clamped externally on various rigid tubing materials such as PFA, PTFE, and PP.
• Lightweight and compact, flexible installation, adapting to the internal space constraints of the equipment
• Clamp-on design requires no tubing cutting; installation can be completed in minutes.
• Low straight tubing requirement (5D upstream, 3D downstream), easy installation even in complex pipeline layouts.
• 2% flow rate measurement accuracy, repeatability up to ±0.1%, and millisecond-level response speed.
• Built-in bubble detection function and supports bidirectional flow rate measurement.
CDS Chemical Supply Cabinet Flow Measurement Scenarios

1. Adhesive Liquid Supply System

Adhesive liquid have high viscosity; some flow meters with moving parts may have measurement errors when measuring adhesive liquids, leading to over-addition or insufficient supply.

Solution:

Install CPD clamp-on ultrasonic flow sensor / flow meters on main supply pipelines to monitor total supply flow in real-time.

Install CPD clamp- on ultrasonic flow sensor/ flow meters on sub-branch pipelines to precisely control the flow distributed to each dispensing branch.

2. CMP Slurry Distribution System

CMP slurries contain solid particles that can damage the flow meters with moving parts; cause uneven slurries distribution.

Solution:

Install CPD clamp on flow sensors / flow meters both on the main distribution pipes and branch lines for accurate flow rate measurement.

PLC adjusts valve openings based on feedback from real time flow rate measurement data.

3. High-purity Liquid Delivery System
High-purity liquids can be contaminated by in-line flow sensor/flow meters.
Solution:

Clamp-on the out side of the tubing, no contact with the liquid, 0 contamination risk.

Mean Time Between Failures (MTBF) > 50,000 hours, long lifespan, low maintenance frequency and requirement.

Customer Value

• Support Measurement of Various Liquids : Solves flow rate measurement challenges for high-viscosity, strongly corrosive chemicals.

• Simple Maintenance: Maintenance-free design, no frequent cleaning or calibration needed.

• Easy Installation: No tube cutting required, supports quick installation within a few minutes, without affecting production or operation.
• Quick Installation: Clamp-on design allows flow sensor installation in just minutes.

• No Leakage Risk: Non-invasive flow rate measurement eliminates chemical leakage risks.
• Improved Control Accuracy: Real-time high-accuracy flow data supports rapid closed-loop control.
• Process Optimization: Provides flow data foundation for predictive maintenance and process optimization.
• Complete Data Traceability: Records detailed data for each chemical supply channel, supporting quality traceability.
• Anomaly Alarms: Automatic alerts for abnormal flow rate fluctuations.