The CDS Chemical Supply Cabinet (Chemical Delivery System) is used for centralized supply and distribution of high-purity chemicals, playing an important role in multiple stages of automated processes. Transported liquids include photoresists, slurries, strong acids (such as H₂SO₄, HF), strong alkalis (such as KOH, NH₄OH), and organic solvents (such as IPA, PGMEA).

These chemicals are precisely transported through pipelines to wet process equipment. CDS equipment typically adopts "one active, one standby" supply cabinets, pumps, filters, and flow sensors/flow meters, achieving automated proportioning, constant pressure/constant flow delivery, and zero contamination risk.

XY-TEK CPD clamp-on ultrasonic flow sensor / flow meter, as a non-invasive flow rate measurement tool, can be seamlessly integrated into the circulation tubing of CDS cabinets, providing real-time flow measurement and supporting full-process digital closed-loop control. The CPD ultrasonic flow sensor / flow meter uses corrosion-resistant housing materials, has a compact size, and is suitable for installation in space-constrained chemical delivery equipment environments.